1 motorola sensor device data
"# !" " !!# ! ! the mpx2100 and mpx2101 series device is a silicon piezoresistive pressure sensors providing a highly accurate and linear voltage output e directly proportional to the applied pressure. the sensor is a single, monolithic silicon diaphragm with the strain gauge and a thinfilm resistor network integrated onchip. the chip is laser trimmed for precise span and offset calibration and temperature compensation. features ? temperature compensated over 0 c to + 85 c ? unique silicon shear stress strain gauge ? easy to use chip carrier package options ? available in absolute, differential and gauge configurations ? ratiometric to supply voltage ? 0.25% linearity (mpx2100d) application examples ? pump/motor controllers ? robotics ? level indicators ? medical diagnostics ? pressure switching ? barometers ? altimeters figure 1 illustrates a block diagram of the internal circuitry on the standalone pressure sensor chip. figure 1. temperature compensated pressure sensor schematic v s 3 xducer sensing element thin film temperature compensation and calibration circuitry 2 4 v out+ v out 1 gnd voltage output versus applied differential pressure the differential voltage output of the xducer is directly proportional to the differential pressure applied. the absolute sensor has a builtin reference vacuum. the output voltage will decrease as vacuum, relative to ambient, is drawn on the pressure (p1) side. the output voltage of the differential or gauge sensor increases with increasing pressure applied to the pressure (p1) side relative to the vacuum (p2) side. similarly, output voltage increases as increasing vacuum is applied to the vacuum (p2) side relative to the pressure (p1) side. preferred devices are motorola recommended choices for future use and best overall value. xducer is a trademark of motorola, inc. order this document by mpx2100/d
semiconductor technical data ? motorola, inc. 1998 basic chip carrier element case 34415, style 1 differential port option case 344c01, style 1
0 to 100 kpa (0 to 14.5 psi) 40 mv full scale span (typical) note: pin 1 is the notched pin. pin number 1 2 gnd +v out 3 4 v s v out motorola preferred device rev 7
2 motorola sensor device data maximum ratings rating symbol value unit overpressure (8) (p1 > p2) p max 200 kpa burst pressure (8) (p1 > p2) p burst 1000 kpa storage temperature t stg 40 to +125 c operating temperature t a 40 to +125 c operating characteristics (v s = 10 vdc, t a = 25 c unless otherwise noted, p1 > p2) characteristic symbol min typ max unit pressure range (1) p op 0 e 100 kpa supply voltage (2) v s e 10 16 vdc supply current i o e 6.0 e madc full scale span (3) mpx2100a, mpx2100d, mpx2101d series mpx2101a series v fss 38.5 37.5 40 40 41.5 42.5 mv offset (4) mpx2100d, mpx2101d series mpx2100a series mpx2101a series v off 1.0 2.0 3.0 e e e 1.0 2.0 3.0 mv sensitivity d v/ d p e 0.4 e mv/kpa linearity (5) mpx2100d series mpx2100a series mpx2101d series mpx2101a series e e 0.25 1.0 0.5 2.0 e e e e 0.25 1.0 0.5 2.0 %v fss pressure hysteresis (5) (0 to 100 kpa) e e 0.1 e %v fss temperature hysteresis (5) ( 40 c to +125 c) e e 0.5 e %v fss temperature effect on full scale span (5) tcv fss 1.0 e 1.0 %v fss temperature effect on offset (5) tcv off 1.0 e 1.0 mv input impedance z in 1000 e 2500 w output impedance z out 1400 e 3000 w response time (6) (10% to 90%) t r e 1.0 e ms warmup e e 20 e ms offset stability (9) e e 0.5 e %v fss mechanical characteristics characteristic symbol min typ max unit weight (basic element case 34415) e e 2.0 e grams common mode line pressure (7) e e e 690 kpa notes: 1. 1.0 kpa (kilopascal) equals 0.145 psi. 2. device is ratiometric within this specified excitation range. operating the device above the specified excitation range may i nduce additional error due to device selfheating. 3. full scale span (v fss ) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. 4. offset (v off ) is defined as the output voltage at the minimum rated pressure. 5. accuracy (error budget) consists of the following: ? linearity: output deviation from a straight line relationship with pressure, using end point method, over the specified pressure range. ? temperature hysteresis: output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied. ? pressure hysteresis: output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or maximum rated pressure, at 25 c. ? tcspan: output deviation at full rated pressure over the temperature range of 0 to 85 c, relative to 25 c. ? tcoffset: output deviation with minimum rated pressure applied, over the temperature range of 0 to 85 c, relative to 25 c. 6. response time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when s ubjected to a specified step change in pressure. 7. common mode pressures beyond specified may result in leakage at the casetolead interface. 8. exposure beyond these limits may cause permanent damage or degradation to the device. 9. offset stability is the product's output deviation when subjected to 1000 hours of pulsed pressure, temperature cycling with bias test.
3 motorola sensor device data linearity linearity refers to how well a transducer's output follows the equation: v out = v off + sensitivity x p over the operating pressure range. there are two basic methods for calculating nonlinearity: (1) end point straight line fit (see figure 2) or (2) a least squares best line fit. while a least squares fit gives the abest caseo linearity error (lower numerical value), the calculations required are burdensome. conversely, an end point fit will give the aworst caseo error (often more desirable in error budget calculations) and the calculations are more straightforward for the user. motorola's specified pressure sensor linearities are based on the end point straight line method measured at the midrange pressure. figure 2. linearity specification comparison least square deviation relative voltage output pressure (% fullscale) 0 50 100 end point straight line fit exaggerated performance curve least squares fit straight line deviation offset onchip temperature compensation and calibration figure 3 shows the output characteristics of the mpx2100 series at 25 c. the output is directly proportional to the differential pressure and is essentially a straight line. the effects of temperature on full scale span and offset are very small and are shown under operating characteris- tics. figure 3. output versus pressure differential figure 4. crosssectional diagrams (not to scale) output (mvdc) kpa psi 40 35 30 25 15 10 5 0 5 025 3.62 50 7.25 75 10.87 100 14.5 span range (typ) offset (typ) 20 typ min v s = 10 vdc t a = 25 c p1 > p2 max silicone gel die coat wire bond lead frame differential/gauge die stainless steel metal cover epoxy case differential/gauge element die bond silicone gel die coat wire bond lead frame absolute die stainless steel metal cover epoxy case die bond absolute element p1 p2 p1 p2 figure 4 illustrates the absolute sensing configuration (right) and the differential or gauge configuration in the basic chip carrier (case 34415). a silicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the silicon diaphragm. the mpx2100 series pressure sensor operating charac- teristics and internal reliability and qualification tests are based on use of dry air as the pressure media. media other than dry air may have adverse effects on sensor perfor- mance and long term reliability. contact the factory for in- formation regarding media compatibility in your application.
4 motorola sensor device data pressure (p1)/vacuum (p2) side identification table motorola designates the two sides of the pressure sensor as the pressure (p1) side and the vacuum (p2) side. the pressure (p1) side is the side containing the silicone gel which isolates the die. the differential or gauge sensor is designed to operate with positive differential pressure applied, p1 > p2. the absolute sensor is designed for vacuum applied to p1 side. the pressure (p1) side may be identified by using the table below: part number case type pressure (p1) side identifier mpx2100a mpx2100d mpx2101a 34415 c stainless steel cap mpx2100dp mpx2101dp 344c01 side with part marking mpx2100ap mpx2100gp mpx2101ap MPX2101GP 344b01 side with port attached mpx2100as 344e01 side with port attached mpx2100asx mpx2100gsx 344f01 side with port attached ordering information mpx2100 series pressure sensors are available in absolute, differential and gauge configurations. devices are available in the basic element package or with pressure port fittings which provide printed circuit board mounting ease and barbed hose pressure connections. mpx series device type options case type order number device marking basic element absolute, differential case 34415 mpx2100a mpx2100d mpx2101a mpx2100a mpx2100d mpx2101a ported elements differential case 344c01 mpx2100dp mpx2101dp mpx2100dp mpx2101dp absolute, gauge case 344b01 mpx2100ap mpx2100gp mpx2101ap MPX2101GP mpx2100ap mpx2100gp mpx2101ap MPX2101GP absolute, gauge stove pipe case 344e01 mpx2100as mpx2100gs mpx2100a mpx2100d gauge vacuum stove pipe case 344a01 mpx2100gvs mpx2100d absolute, gauge axial case 344f01 mpx2100asx mpx2100gsx mpx2100a mpx2100d
5 motorola sensor device data package dimensions case 34415 issue z style 1: pin 1. ground 2. + output 3. + supply 4. output m a m 0.136 (0.005) t 1234 pin 1 r n l g f d 4 pl seating plane t c m j b a dim min max min max millimeters inches a 0.595 0.630 15.11 16.00 b 0.514 0.534 13.06 13.56 c 0.200 0.220 5.08 5.59 d 0.016 0.020 0.41 0.51 f 0.048 0.064 1.22 1.63 g 0.100 bsc 2.54 bsc j 0.014 0.016 0.36 0.40 l 0.695 0.725 17.65 18.42 m 30 nom 30 nom n 0.475 0.495 12.07 12.57 r 0.430 0.450 10.92 11.43 notes: 1. dimensioning and tolerancing per asme y14.5m, 1994. 2. controlling dimension: inch. 3. dimension a is inclusive of the mold stop ring. mold stop ring not to exceed 16.00 (0.630). dambar trim zone: f this is included within dim. afo 8 pl 1 23 4 y z y 0.048 0.052 1.22 1.32 z 0.106 0.118 2.68 3.00 case 344a01 issue b notes: 1. dimensioning and tolerancing per ansi y14.5m, 1982. 2. controlling dimension: inch. style 1: pin 1. ground 2. + output 3. + supply 4. output positive pressure pin 1 4 pl port #2 vacuum pressure 1 seating plane 23 4 k a s g f d m b m 0.13 (0.005) t c n r v j b t dim min max min max millimeters inches a 0.690 0.720 17.53 18.28 b 0.245 0.255 6.22 6.48 c 0.780 0.820 19.81 20.82 d 0.016 0.020 0.41 0.51 f 0.048 0.064 1.22 1.63 g 0.100 bsc 2.54 bsc j 0.014 0.016 0.36 0.41 k 0.345 0.375 8.76 9.53 n 0.300 0.310 7.62 7.87 r 0.178 0.186 4.52 4.72 s v 0.182 0.194 4.62 4.93 0.220 0.240 5.59 6.10 (p1) (p2)
6 motorola sensor device data package dimensions e continued style 1: pin 1. ground 2. + output 3. + supply 4. output case 344b01 issue b seating plane b n r c j t d f u h l port #1 positive pressure pin 1 a q s k g 4 pl p s q m 0.25 (0.010) t s s m 0.13 (0.005) q s t 12 34 notes: 1. dimensioning and tolerancing per ansi y14.5, 1982. 2. controlling dimension: inch. dim min max min max millimeters inches a 1.145 1.175 29.08 29.85 b 0.685 0.715 17.40 18.16 c 0.305 0.325 7.75 8.26 d 0.016 0.020 0.41 0.51 f 0.048 0.064 1.22 1.63 g 0.100 bsc 2.54 bsc h 0.182 0.194 4.62 4.93 j 0.014 0.016 0.36 0.41 k 0.695 0.725 17.65 18.42 l 0.290 0.300 7.37 7.62 n 0.420 0.440 10.67 11.18 p 0.153 0.159 3.89 4.04 q 0.153 0.159 3.89 4.04 r 0.230 0.250 5.84 6.35 s u 0.910 bsc 23.11 bsc 0.220 0.240 5.59 6.10 (p1) style 1: pin 1. ground 2. + output 3. + supply 4. output port #2 port #1 port #2 vacuum seating plane seating plane k s w h l u f g d port #1 positive pressure q 12 4 3 pin 1 4 pl p t t s q m 0.25 (0.010) t s s m 0.13 (0.005) q s t b n j c v r notes: 1. dimensioning and tolerancing per ansi y14.5m, 1982. 2. controlling dimension: inch. dim min max min max millimeters inches a 1.145 1.175 29.08 29.85 b 0.685 0.715 17.40 18.16 c 0.405 0.435 10.29 11.05 d 0.016 0.020 0.41 0.51 f 0.048 0.064 1.22 1.63 g 0.100 bsc 2.54 bsc h 0.182 0.194 4.62 4.93 j 0.014 0.016 0.36 0.41 k 0.695 0.725 17.65 18.42 l 0.290 0.300 7.37 7.62 n 0.420 0.440 10.67 11.18 p 0.153 0.159 3.89 4.04 q 0.153 0.159 3.89 4.04 r 0.063 0.083 1.60 2.11 s u 0.910 bsc 23.11 bsc v 0.248 0.278 6.30 7.06 w 0.310 0.330 7.87 8.38 a 0.220 0.240 5.59 6.10 (p2) (p1) case 344c01 issue b
7 motorola sensor device data package dimensions e continued style 1: pin 1. ground 2. + output 3. + supply 4. output s notes: 1. dimensioning and tolerancing per ansi y14.5m, 1982. 2. controlling dimension: inch. dim min max min max millimeters inches a 0.690 0.720 17.53 18.28 b 0.245 0.255 6.22 6.48 c 0.780 0.820 19.81 20.82 d 0.016 0.020 0.41 0.51 f 0.048 0.064 1.22 1.63 g 0.100 bsc 2.54 bsc j 0.014 0.016 0.36 0.41 k 0.345 0.375 8.76 9.53 n 0.300 0.310 7.62 7.87 r 0.178 0.186 4.52 4.72 s v 0.182 0.194 4.62 4.93 back side vacuum pin 1 4 pl port #1 positive pressure 4 seating plane 32 1 k a g f d m b m 0.13 (0.005) t c n r v j b t 0.220 0.240 5.59 6.10 (p1) (p2) case 344e01 issue b notes: 1. dimensioning and tolerancing per ansi y14.5m, 1982. 2. controlling dimension: inch. style 1: pin 1. ground 2. v (+) out 3. v supply 4. v () out e c j v t port #1 positive pressure pin 1 4 pl d p g k m q m 0.25 (0.010) t u a f s n b s p m 0.13 (0.005) q s t dim min max min max millimeters inches a 1.080 1.120 27.43 28.45 b 0.740 0.760 18.80 19.30 c 0.630 0.650 16.00 16.51 d 0.016 0.020 0.41 0.51 e 0.160 0.180 4.06 4.57 f 0.048 0.064 1.22 1.63 g 0.100 bsc 2.54 bsc j 0.014 0.016 0.36 0.41 k n 0.070 0.080 1.78 2.03 p 0.150 0.160 3.81 4.06 q 0.150 0.160 3.81 4.06 r 0.440 0.460 11.18 11.68 s 0.695 0.725 17.65 18.42 u 0.840 0.860 21.34 21.84 v 0.182 0.194 4.62 4.92 q r 4321 0.220 0.240 5.59 6.10 (p1) case 344f01 issue b
8 motorola sensor device data motorola reserves the right to make changes without further notice to any products herein. motorola makes no warranty, represe ntation or guarantee regarding the suitability of its products for any particular purpose, nor does motorola assume any liability arising out of the applicati on or use of any product or circuit, and specifically disclaims any and all liability, including without limitation consequential or incidental damages. atypicalo para meters which may be provided in motorola data sheets and/or specifications can and do vary in different applications and actual performance may vary over time. all ope rating parameters, including atypicalso must be validated for each customer application by customer's technical experts. motorola does not convey any license under it s patent rights nor the rights of others. motorola products are not designed, intended, or authorized for use as components in systems intended for surgical imp lant into the body, or other applications intended to support or sustain life, or for any other application in which the failure of the motorola product cou ld create a situation where personal injury or death may occur. should buyer purchase or use motorola products for any such unintended or unauthorized application, buyer shall indemnify and hold motorola and its officers, employees, subsidiaries, affiliates, and distributors harmless against all claims, costs, damages, and expens es, and reasonable attorney fees arising out of, directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized u se, even if such claim alleges that motorola was negligent regarding the design or manufacture of the part. motorola and are registered trademarks of motoro la, inc. motorola, inc. is an equal opportunity/affirmative action employer. mfax is a trademark of motorola, inc. how to reach us: usa / europe / locations not listed : motorola literature distribution; japan : nippon motorola ltd.; spd, strategic planning office, 141, p.o. box 5405, denver, colorado 80217. 13036752140 or 18004412447 4321 nishigotanda, shinagawaku, tokyo, japan. 813 54878488 customer focus center: 18005216274 mfax ? : rmfax0@email.sps.mot.com touchtone 1 6022446609 asia / pacific : motorola semiconductors h.k. ltd.; 8b tai ping industrial park, motorola fax back system us & canada only 18007741848 51 ting kok road, tai po, n.t., hong kong. 85226629298 http://sps.motorola.com/mfax/ home page : http://motorola.com/sps/ mpx2100/d ?
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